CMP
In the precision race of semiconductor manufacturing, every process breakthrough relies on the solid support of underlying technologies. As the core process for achieving global wafer planarization, chemical mechanical polishing (CMP) is the critical link in the front-end of advanced integrated circuits and advanced packaging (such as CoWoS). Its nanoscale surface flattening directly impacts chip yield and performance.
When domestic CMP equipment successfully broke through the 14nm process, Phoenix Contact, with its century-long accumulation of connection technology, injected high-reliability genes into each device, ensuring the stable output of key parameters such as polishing pressure, rotation speed, and flatness, and helping to implement advanced processes.
A must-read for semiconductor professionals
To meet the high-density layout, high cleanliness requirements, and strong stability demands of CMP equipment , Phoenix Contact's PT series plug-in rail terminal blocks, with their Push-in spring connection technology, have become the preferred solution for a well-known semiconductor equipment manufacturer. Three core modules precisely adapt to the equipment's complex connection scenarios:
PTIO sensor/actuator terminals
PTIO is compact and offers flexible bit configuration. Compared to traditional solutions, its widespread use can reduce material requirements by 50% and save over 60% of cabinet space.
▸ Push-in technology, efficient and reliable installation
▸ Single 3.5mm connector can connect 3-wire or 4-wire sensors and actuators, saving space
▸ Modular expansion up to 50 positions
▸ LED status display, complete identification types
50%
Can reduce the amount of materials
60%
Can reduce cabinet space
PTFIX potential distributor modules
Available in various wiring capacities, positions, mounting methods, and colors, they meet a wide range of potential distribution needs within the cabinet while reducing material and space requirements. Modules can be used directly or expanded as needed.
▸The internal potential of a single module is the same, reducing the number of materials by up to 90%
▸Compact size, saving at least 30% of the guide rail width
▸ Flexible installation with various adapters and self-adhesive mounting options
▸Compatible with the CLIPLINE complete accessory system
30%
At least the width of the rail can be saved
PTU potential distribution terminal
The compact design and front-facing connection make it possible to connect cables even in confined spaces. It supports different combinations of 35mm² screw terminals, 4x10mm² push-in terminals, and 4x6mm² + 6x2,5mm² terminals. Furthermore, it can be further expanded with DIN rail terminal blocks that support CLIPLINE complete accessories.
▸Use different connection methods to meet internal and external wiring requirements at the same time
▸Fully enclosed structure, no need for additional end plates, reducing the amount of materials
▸ Flexible bridging with standard CLIPLINE complete accessories
▸ Screw side adapter AGK branch line accessories
In addition to the PT series terminals, Phoenix Contact can also provide supporting compact product solutions such as switching power supplies, equipment circuit breakers, and EMC filters .
The wave of localization is surging.
Technological innovation has no boundaries.
With a century of technological heritage, Phoenix Contact is deeply integrated into the localization process of semiconductor equipment: with customized connection solutions as the anchor, it works shoulder to shoulder with domestic equipment manufacturers to overcome difficulties, from 14nm to more advanced processes, and continuously outputs innovative results of "high reliability + strong adaptability", injecting hard-core power into the performance leap and technological breakthroughs of domestic equipment.